THIN FILMS AND COATINGS
IntroductionStainless steel films are reactively magnetron sputtered in argon or nitrogen gas flow ontooxidized silicon wafers using austenitic AISI 316 stainless-steel targets. The use of Nitride isa preferable coating substance for thin films applications because of its astonishing hardness,adhesion, and toughness (Bayer and Lee, 2006, p.39-42). The placed films of about 200 nmthickness of well-cleaned substrates of glass, for example, silicon and stainless steel werecharacterized by […]